News: Microelectronics
11 June 2026
Veeco’s new LUMINA+ MOCVD system qualified by Ennostar
Epitaxial deposition and process equipment maker Veeco Instruments Inc of Plainview, NY, USA has announced the first commercial acceptance and qualification of its LUMINA+ metal-organic chemical vapor deposition (MOCVD) system by Ennostar Corp of Hsinchu, Taiwan (a provider of integrated optoelectronic solutions, specializing in R&D and manufacturing III-V materials). The order is said to set a new benchmark for high-volume arsenide and phosphide (As/P) production.
“We see LUMINA+ as a game-changer for the fast-growing As/P market,” says Anil Vijayendran, VP of MOCVD product line management at Veeco. “It’s validation by an industry expert like Ennostar that effectively positions Veeco as a leader in enabling advanced optoelectronic devices,” he adds. The platform combines proven TurboDisc technology with what is claimed to be breakthrough productivity.
With an evaluation process that began in late 2025 at its Taiwan facilities, the LUMINA+ system is now qualified for production, demonstrating unprecedented speed of product qualification and capacity scalability. Ennostar will deploy the tool in high-volume production of high-end optoelectronic devices. With what is said to be the largest-capacity reactor in the industry, and high throughput, the system is engineered to meet customers’ stringent performance requirements with improved process efficiency.
According to industry analyst firm Yole Intelligence, the market for micro-LED display panels is rising at a 10-year compound annual growth rate (CAGR) of 87% to nearly $7bn by 2032, driven predominantly by augmented/mixed/virtual reality and television displays. By combining scale with precision, Veeco says that the LUMINA+ system aligns with the compound semiconductor industry’s roadmap for high-performance, cost-effective optoelectronic devices manufactured at scale, helping to drive innovation across consumer electronics, automotive, optical communications and biosensing.
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