News: Suppliers
24 November 2025
Beneq launches Transform XP second-generation ALD platform
Atomic layer deposition (ALD) equipment and solutions firm Beneq of Espoo, Finland has introduced the Transform XP, a second-generation ALD platform developed to meet the performance demands of wide-bandgap (WBG) power and RF device technology development and manufacturing. Building on the proven Transform platform, the new system adds advanced ALD control, faster cycle times, and greater process capabilities in a high-throughput format.
The Transform XP features a second-generation, flow-optimized 25-wafer mini-batch thermal ALD reactor that achieves what is claimed to be breakthrough deposition rates with single-digit-second cycle times for common ALD oxides and nitrides. Refined flow and pressure dynamics ensure exceptional within-wafer and wafer-to-wafer uniformity – even at a few nm film thicknesses – while precise dwell-time control delivers excellent conformality on high-aspect-ratio structures.
Transform XP also introduces advanced PEALD process control to precisely manage low-energy ions. This enables optimized plasma pre-cleaning and deposition, resulting in improved interface quality, tunable passivation, and enhanced device performance and reliability. The system integrates in-cycle annealing, a proprietary step that densifies and purifies films to achieve stoichiometric, low-impurity materials and crystalline alignment, such as aluminium nitrideAlN lattice orientation.
“Transform XP is our response to the next wave of device challenges in power and RF manufacturing,” says Dr Mikko Söderlund, head of sales, Semiconductor ALD. “Customers value the original Transform for its versatility and reliability. With XP, we introduce capabilities they specifically asked for – improved ion control, faster cycles, and in-cycle film densification – all in a versatile platform.”
With over a dozen Transform clusters installed globally for WBG pilot and production use, and more than 100 process modules shipped, Beneq continues to support leading IDMs, foundries and RTOs advancing More-than-Moore technologies, motes the firm.
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