News: Suppliers
10 September 2025
Eulitha ships 6-inch-wafer DUV litho systems to several Asian VCSEL foundries
Eulitha AG of Kirchdorf, Switzerland (which provides lithography equipment and services for the nanotechnology, photonics and optoelectronic markets) says that several Asian vertical-cavity surface-emitting laser (VCSEL) foundries have adopted its deep ultraviolet (DUV) patterning platform for 6-inch wafer production. Eulitha recently shipped multiple systems to support the rapidly growing demand for VCSELs used in applications ranging from LiDAR, 3D sensing, data centers, and next-generation optical communications.
Eulitha reckons that the adoption of its technology marks a strategic shift among manufacturers seeking to meet the increasing need for high-resolution patterning that is cost-competitive, particularly as VCSEL designs become more complex.
Growing VCSEL demand drives need for scalable lithography
Additionally, polarized sensing — an emerging capability made possible with specially structured VCSELs — offers improved accuracy and contrast in biometric and industrial sensing, fueling further innovation and market expansion.
This wave of innovation requires patterning techniques that can deliver extremely high resolution, repeatability and throughput, cost effectively on 6-inch wafer formats. Eulitha claims that its technology is uniquely positioned to meet these demands.
Eulitha’s lithography
Eulitha’s tool platforms use proprietary non-contact optical lithography technology, known as displacement Talbot lithography (DTL), to deliver a range of advantages. High-resolution, precision patterning is ideal for advanced VCSEL arrays, while its large exposure field covers an entire 6-inch wafer in a single shot, reducing stitching errors and enhancing uniformity. The system supports high-throughput production with consistent results across wafers and production batches. A key feature of DTL is the large depth of focus (DOF), which allows for patterning on non-flat wafers. Together, these capabilities lead to higher device performance, tighter process control, and reduced cost per die for manufacturers, says Eulitha.
Picture: Eulitha’s PhableX lithography system.
Supporting the future of photonics
After serving the distributed feedback (DFB) laser application market for many years, “VCSEL technology is evolving rapidly, and the market needs lithography tools that can keep up,” says CEO Dr Harun Solak. “Our PhableX systems are enabling our customers in Asia to scale up their 6-inch VCSEL production with confidence, delivering the precision and productivity needed to address growing demand in critical sectors like LiDAR and optical interconnects.”
With a growing global customer base and a commitment to delivering precision photonics manufacturing, Eulitha reckons that it is poised to play a central role in the future of high-performance optoelectronic devices.
Eulitha is exhibiting at the China International Optoelectronic Exposition (CIOE 2025) in Shenzhen (10–12 September), and presenting on ‘Innovative optical lithography for high-resolution patterning in semiconductor laser production’ on 11 September.
Eulitha launches PhableX lithography systems for volume production of photonic products
