News: Suppliers
20 November 2025
Ohio State University buys Aixtron CCS MOCVD system
The Ohio State University (OSU) has purchased a Close Coupled Showerhead system for metal-organic chemical vapor deposition (CCS MOCVD) from Aixtron SE of Herzogenrath, near Aachen, Germany. The tool will be used for epitaxy of gallium oxide (GaO) and aluminum gallium oxide (AlGaO) for materials and device development on 100mm substrates.
Compared to traditional semiconductor materials, gallium oxide and its alloys are known for their superior performance at higher voltages, frequencies and temperatures. The new tool will enable OSU to explore the properties of these materials and develop novel device architectures.
“We have had a great experience working with Aixtron CCS reactors in the past for GaAs and InP materials. Their reactors are world-renowned for state-of-the-art uniformity, high material quality, and large process windows. AIXTRON has demonstrated this for gallium oxide (GaO) and aluminum gallium oxide (AlGaO), and we look forward to partnering with Aixtron as we develop novel epitaxy layers and devices using this tool,” says professor Steven A. Ringel, associate VP of research at The Ohio State University and executive director of Ohio State’s Institute for Materials and Manufacturing Research (IMR). “We particularly value the scalability the platform offers to us and our partners, while providing us with the immediate capability for up to 4” wafers,” he adds.
“We are delighted to announce our partnership with OSU and the esteemed professors Hongping Zhao, Siddarth Rajan, and Steve Ringel,” says Aixtron’s CEO Dr Felix Grawert. “Our CCS MOCVD tools have consistently demonstrated exceptional performance in supporting cutting-edge academic research and seamlessly scaling to tier-1 industrial applications,” he adds. “We are particularly enthusiastic about the promising advancements in gallium oxide technology, which herald the next generation of power devices.”
The Ga2O3-capable MOCVD reactor will be installed at Nanotech West Lab, a 3500m2 shared user facility servicing the Ohio State materials community. The lab is operated by IMR, a multi-disciplinary institute that provides infrastructure support, development and management of major research facilities at Ohio State.
CISM at Swansea establishes UK’s first capability for 4-inch gallium oxide thin-film growth
Aixtron to ship CCS MOCVD system to University of Texas at Austin for gallium oxide power devices
