News: Suppliers
19 May 2025
Pfeiffer Vacuum+Fab Solutions adds CNR series to CenterLine family of vacuum gauges
Busch Group company Pfeiffer Vacuum+Fab Solutions of Aßlar, Germany has expanded its CenterLine family of vacuum gauges by launching the CNR series, suited particularly for the harsh operating conditions in the semiconductor industry.
The CenterLine CNR series consists of analog capacitive vacuum gauges that can measure over four decades in the full scale between 0.1Torr and 1000Torr. Available in heated and unheated variants, the CNR series delivers reliable measurements even under the harshest operating conditions. Like the other CenterLine gauges, it provides an optimal cost–performance ratio and allows easy integration into existing installations with measurement technology from other manufacturers, says the firm.
CNR series gauges are ideally used in combination with pressure control valves and can be used for a wide range of applications in the semiconductor industry, such as dry etching, chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes. They can also be implemented for analytics, R&D and various other industries.
Five different variants are available (the 36x, 37x, 38x, 39x and 30x, all SEMI S2-compliant), providing options for processes at different temperatures. The 36x is an unheated variant for reliable measurements at ambient temperature with an accuracy of 0.2%. Self-heating versions are also available at 45°C, 100°C, 160°C and 200°C. The 45°C variant provides an accuracy of 0.15%, making it excellent for calibration laboratories and high-quality control, says the firm. With an accuracy of 0.4%, the other self-heating versions allow higher accuracy of readings in high-temperature or hot gas processes than comparable gauges, it is claimed.
The heart of the measurement device is a diaphragm sensor with a stable and resistant ALD-coated ceramic shield that protects it both from exposure to the high temperatures of the process gases and from potential corrosion. This ultimately ensures higher reliability and accuracy as well as a longer sensor life, even under harsh plasma, due to minimized contamination. As sensor drift is also reduced, calibration is required less frequently and thus the overall cost of ownership is lowered.
The gauges in the CenterLine CNR series are equipped with a special pressure control (p-control) filter setting. This is designed to be fast and adaptive, enabling the gauge to respond more quickly to pressure changes as well as providing accurate and smooth pressure control. This feature is particularly effective in combination with a pressure control valve.
Pfeiffer Vacuum+Fab Solutions online shop opens for customers in EEA countries
The online shop for vacuum components, vacuum chambers and measurement equipment from Pfeiffer Vacuum+Fab Solutions is now available to customers in the European Economic Area (EEA), with the exception of Finland. The product range is hence available in a total of 26 European Union countries as well as Iceland, Liechtenstein and Norway. Purchase orders can also be placed in English in addition to German.
As a result, customers of the Busch Group can now also order products from outside Germany and receive vacuum components, vacuum chambers and gauges easily and in the shortest possible time: Pfeiffer guarantees its customers in Germany delivery within 24 hours of receipt of the order. For purchase orders from other EU countries, the company guarantees delivery within 48–72 hours.
The online shop offers high-quality standard accessories that ensure the optimal performance and reliability of vacuum systems, says the firm. For example, the portfolio includes flanged components such as ISO-KF (ISO 2861), ISO-K/ISO-F (ISO 1609), CF (ISO 3669), which comply with international standards and provide reliable connections for vacuum applications.
Flexible hoses and bellows for various applications, precise feedthroughs and manipulators as well as high-quality viewports are also available in the shop.
A selection of robust valves for different pressure ranges, precise gauges for monitoring and controlling vacuum processes, and standard vacuum chambers for a wide range of applications can also be ordered online.
For optimal support in product selection, the online shop offers clear, comprehensive technical documents and 3D files. Its user-friendly design facilitates quick and easy registration. Due to the intuitive user interface, the desired products can be found quickly and easily, the firm adds.
The self-service portal offers customers the opportunity to independently manage functions and user rights and therefore use the shop flexibly and efficiently. By using tailor-made ERP interfaces, order processing is automated. This reduces manual effort and minimizes errors, resulting in faster and more efficient processing of customer orders.
The online shop is available at www.vacuum-shop.com. New customers can register at this address.
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