News: Suppliers
1 December 2023
Spirox and Southport launch first non-destructive SiC defect inspection system
Spirox Corp of Hsinchu, Taiwan, in collaboration with its subsidiary Southport Corp, has jointly launched the industry-first JadeSiC-NK non-destructive defect inspection system, which uses non-linear optical technology for whole wafer scanning of SiC substrates, identifying killer defects within the substrate. By replacing the existing high-cost, destructive KOH (potassium hydroxide) etching detection method, it leads to increased production yields and process improvement. Based on the need to etch two substrates for each SiC ingot, JadeSiC-NK can save a substrate manufacturer with 100 crystal growth furnaces about US$7.68m in annual costs incurred due to etching losses, it is reckoned.
SiC crystal growth is slow, and substrate crystal defects currently can only be inspected by sampling and mathematic interpolation with the destructive KOH etching method, making the cost of SiC chip manufacturing processes consistently high. Major SiC substrate makers worldwide are investing in capacity expansion and process improvement to increase their market share. If SiC substrate and component manufacturers can implement comprehensive non-destructive inspection of materials in the manufacturing process, it will not only reduce the usage of harmful chemical solutions associated with KOH etching but also allow for the early detection of defects. This, in turn, enables effective process improvement and enhances yield.
Existing optical technologies on the market can only detect surface non-crystalline defects, notes Southport’s general manager Jay Wang. However, JadeSiC-NK utilizes non-linear optical technology, allowing for a whole-wafer surface scan to a specific depth to provide crystal structure information, offering detail on crystal defect density and distribution, and enabling customers to effectively assess substrate quality to ensure the stability of the quality and performance of components produced.
Wang further explains that the JadeSiC-NK non-destructive defect inspection system focuses on efficiently and stably identifying killer defects (BPD, TSD, micro-pipe, stacking fault). Compared to the existing KOH etching method, which involves inspecting two substrates from sliced SiC ingots, JadeSiC-NK can significantly save inspection time and substrate costs. For example, a crystal growth furnace producing four ingots per month, with JadeSiC-NK, each ingot can save the cost of two substrates (calculated at $800 per each 6-inch substrate), resulting in an estimated annual savings over $70,000 per furnace. For a substrate manufacturer with 100 furnaces, this amounts to annual savings of $7.68m, it is reckoned. Furthermore, JadeSiC-NK enables a 100% wafer inspection for the same ingot, facilitating detailed ingot analysis and batch traceability analysis which will assist customers in accelerating process and yield optimization in the high-tech compound semiconductor market.
The JadeSiC-NK system launched by Spirox and Southport applies non-linear optical technology to the inspection and analysis of compound semiconductors, says Dr Hao-Chung Kuo, chair professor of the Department of Optoelectronic Engineering at Taiwan NCYU. This innovation is expected to break through the current industry's technical bottlenecks in mass production and process improvement, providing significant impetus to the development of the industry chain. It is hoped that JadeSiC-NK, with its more effective and stable inspection technology, will establish industry standards for SiC substrate inspection. This, in turn, can lead continuous innovation and breakthroughs in market applications.
“Considering the instability of distribution and the pursuit of a better profit structure, Spirox has been continuously enlarging its investment in own-brand to develop solutions to fulfill customer needs,” says Spirox’s CEO Paul Yang. “Through the acquisition of Southport, Spirox aims to accelerate the development process of our own-brand products, expanding from semiconductor packaging and testing equipment to optical inspection. The initial focus is on the highly promising defect inspection of compound semiconductor materials.”
Since the collaboration between Spirox and Southport in distribution, there has been a mutual understanding of mutual reinforcement, says Yang. The establishment of the Advanced Opto-Material Inspection Laboratory allows the unique optical inspection technology to quickly enter the industry field. Through repeated verification by customers, product specifications are adjusted to meet their needs. In addition to applying non-linear optical technology in the newly launched JadeSiC-NK, there are plans to accelerate the commercialization of advanced optical inspection technologies in areas such as micro-LEDs, metamaterials, silicon photonics etc, in the future. Spirox says that it will continue to increase R&D efforts, effectively integrating group resources to maximize synergies.
“It’s a great pleasure to see two Taiwanese local companies creating synergy through a mutually beneficial collaboration, generating tremendous value for the industry,” comments Ken Tai, chairman of the Photonics Industry and Technology Development Association (PIDA). “The JadeSiC-NK launched by Spirox and Southport represents a groundbreaking technological breakthrough,” he reckons. “It is not only a revolutionary product for the global compound semiconductor industry, capable of significantly reducing costs and increasing production capacity, but also showcases Taiwan’s technological leadership.”
