30 August 2011

Aixtron delivers its first CRIUS II-L system to Taiwan’s Epistar

Deposition equipment maker Aixtron SE of Herzogenrath, Germany has announced the first delivery of its first CRIUS II-L metal-organic chemical vapor deposition (MOCVD) system (launched in early July) to Taiwan’s biggest LED chipmaker, Epistar Corp of Hsinchu Science-based Industrial Park. Aixtron says that the CRIUS II-L offers the largest MOCVD reactor capacity of 69x2” or 16x4” wafers, and reflects the next evolution of the proven CRIUS II system (launched in 2010).

One of Aixtron’s local service teams will install the new reactor at Epistar. Earlier this year, two CRIUS II systems in 55x2”-wafer configuration dedicated to the mass production of ultra-high-brightness (UHB) blue LED materials were installed in the same facility.

“The transfer of our process recipes from the CRIUS and CRIUS II to the latest CRIUS II-L will be flawless,” expects Epistar’s president Dr Ming Jiunn Jou. “It will be easy to achieve the desired uniformity promptly,” he believes.

Epistar is focused on the development and manufacturing of UHB-LED products. Through the application of its proprietary MOCVD epitaxy technology, Epistar has commercialized the full spectrum range of LEDs with the characteristics of compact size, low power consumption and long operation life. After qualification of Aixtron’s next-generation AIX G5 HT system in 2010, Epistar placed a repeat order for multiple G5 systems this April.

See related items:

Aixtron launches largest MOCVD reactor for GaN LEDs

See: Aixtron Company Profile

Tags: Aixtron MOCVD Epistar CRIUS II-L Blue LEDs

Visit: www.epistar.com.tw

Visit: www.aixtron.com