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IQE

26 May 2015

Research institutes invest in Oxford Instruments plasma systems for graphene and 2D materials

UK-based Oxford Instruments says that, as developments in graphene and two-dimensional (2D) materials technology continue to increase, research institutes globally are investing in its plasma processing Nanofab equipment using chemical vapour deposition (CVD), plasma-enhanced CVD (PECVD) and indictively coupled plasma CVD (ICPCVD) techniques to further their work in this key area. Multiple orders have recently been received from research centres in Europe and the USA, including the US Naval Research Laboratory (NRL) and University College London (UCL) in the UK, says the firm.

CVD has been one of the most successful techniques for the fabrication of nanostructured materials such as graphene, carbon nanotubes and other 1D and 2D nanomaterials, notes Oxford Instruments. The Nanofab suits this field of research, the firm adds, as it combines several essential features for high-performance growth, such as a high-temperature heater capable of processing up to 200mm wafers, shower-head technology, automatic load-lock for wafer handling as well as flexible options for liquid/solid precursor delivery.

"We recently placed an order for a Nanofab, chosen for its operating capability, process control, and great flexibility for further modification and upgrades," says UCL professor Zheng-Xiao Guo. "We also like the fact that we will be provided with dedicated after-sales support, not only in running the system, but also in enhancing the scope of our applications," he adds. 

"In recent years there has been a great increase in graphene R&D worldwide, due to the impact that this area of research is expected to exert on tomorrow's technologies and world economy," notes Dr David Haynes, sales & marketing director at Oxford instruments Plasma Technology (OIPT). "Several national research projects as well as industrial companies are now active in graphene production and applications, and more are set to follow." 

Tags: OIPT Graphene CVD

Visit: www.oxford-instruments.com/plasma

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