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11 July 2014

ClassOne opens wet-process applications lab

At Semicon West, wet-chemical equipment maker ClassOne Technology of Kalispell, MT, USA announced the opening of a major new cleanroom and applications lab in Atlanta, Georgia. The Class 100 facility will focus specifically on wet chemical processing such as electroplating, metal lift-off, resist strip, polymer removal, front-end-of-line (FEOL) and back-end-of-line (BEOL) cleaning, dielectric and metal etching etc. The new lab will complement ClassOne’s existing metrology cleanroom lab in Atlanta, considerably expanding the total size and capabilities of the facility.

“In addition to a broad array of wet-processing tools, the lab also provides a full complement of metrology equipment and instrumentation, which allows users to measure and analyze defects, film thickness, film stress and virtually all the other features and qualities of dielectric and metal films,” says Kevin Witt, ClassOne’s VP of Technology. Also, if additional analysis is needed, ClassOne has access to the lab at the Institute for Electronics and Nanotechnology at nearby Georgia Institute of Technology (Georgia Tech).

ClassOne says that its new facility will enable customers to explore and develop wet-chemistry applications on all types of substrates in all sizes from 100 to 200mm. The lab will also serve as a working showcase of ClassOne Technology’s own wet-processing tools, including electroplating, SAT (spray acid tool), SST (spray solvent tool) and SRD (spin rinse dryer) systems. Customers will be able to evaluate equipment first hand and ‘try before they buy’. In addition, the new facility will provide ClassOne with a laboratory for developing, testing and enhancing its new equipment.

See related items:

ClassOne launches electroplating tool for smaller-substrate users

ClassOne Equipment expands Wet Processing Division with new subsidiary

Tags: ClassOne

Visit: www.classone.com

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