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10 July 2013

Sensirion introduces SLQ-QT500 liquid flow sensor for semiconductor industry

Manufacturer of digital microsensors and systems Sensirion AG, of Staefa, Switzerland says that its newest liquid flow sensor, the SLQ-QT500, is designed for the semiconductor industry.

"The SLQ-QT500 is perfect for the high purity requirements of the semiconductor industry,” says Dr Andres Laib, director of sales Liquid Flow Products. “It can be used to monitor coating processes with a variety of liquids and enables optimal process safety."

Based on the firm’s patented CMOSens technology, the SLQ-QT500 covers flow rates from 0-120ml/min. As with all Sensirion liquid flow sensors, its flow channel is absolutely straight and has no moving parts. Microthermal flow measurement is performed through the flow channel wall, which separates the chip from the measured liquids. Therefore, only the PFA tubing and the quartz flow channel are in direct contact with the liquid. This guarantees that the sensor has a superb chemical resistance, says the firm. Thanks to these features as well as the RS485 digital interface, the sensor is able to achieve an exceptionally reliable measurement with a sample rate of up to 1ms.

"The sensor is suitable for measuring hydrocarbon-based solvents such as photoresists, as well as water-based liquids such as TARC and H2O2,” says Laib. “With the SLQ-QT500, liquids with virtually any viscosity [100,000cP and more] as well as liquids which contain particles can be measured. This makes the sensor unique in the liquid flow sensor industry.”

Tags: Liquid flow sensors


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