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12 February 2013

SEMI-GAS upgrades GSM controller

SEMI-GAS Systems, a division of Applied Energy Systems Inc of Malvern, PA, USA and a manufacturer of ultra-high-purity gas handling and distribution systems, says it has updated its GigaGuard GSM (gas safety monitor) controller on its Megaturion Bulk Valve Manifold Box (VMB).

The new GigaGuard GSM controller is PLC based and features a 4.3” color touch screen. Its software features prompts and alarms, which help reduce operator error and increase safety.  Furthermore, operators now have the ability to configure both inputs and outputs as well as adjust set points and limits, making the system more adaptable than the previous GSM 1x4 controller, says the firm. 

GigaGuard GSM independently operates ESO valves, monitors both analog and digital process sensors, displays delivery pressures and continuously monitors the system environment for hazards while maintaining an active alarm log. It also incorporates local and remote system shutdown capabilities in the event of a system trip. 

Available in 4, 6 and 8 stick configurations as well as in customized designs, the semi-automatic Megaturion VMB distributes hazardous process gases from the source to various tools and points of use, as needed, in high flow semiconductor and LED manufacturing applications. 

All Megaturion VMBs meet SEMI S2, SEMI S8 and uniform fire code requirements.  Multiple communications protocols, integrated gas and fire detection and Class 1, Division 2 upgrades are available. 

Tags: SEMI-GAS Gas delivery systems


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