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Plasma process equipment maker Plasma-Therm LLC of St Petersburg, FL, USA says that Stanford University has recently placed an order for two deposition tools (a VERSALINE HDPCVD system and a Shuttlelock PECVD system) to be installed at Stanford’s Nanofabrication Facility.
With its high-density ICP plasma and temperature-controlled environment, the VERSALINE HDPCVD system expands research capabilities by providing critical technology to deposit high-quality dielectric films at low temperatures, says Plasma-Therm. The Suttlelock PECVD system uses a more traditional configuration of parallel-plate electrodes that contributes fundamental and important deposition processes such as controllable low-stress silicon nitride. Together, the systems will be used to assist the Nanofabrication Facility's research efforts in areas such as nanoelectronic devices, MEMS/NEMS and photonics.
“The deposition processes from industry-proven systems like VERSALINE and Shuttlelock will give researchers at the Nanofabrication Facility the tools necessary to make advances in nanoscience applications,” states Plasma-Therm’s executive VP of sales & marketing Ed Ostan. “Plasma-Therm’s worldwide presence at nanofabrication facilities with processing equipment that spans decades is a reflection of equipment durability, reliability and technological relevance,” he reckons. “Our continuous involvement and collaboration with these advanced laboratories is what stimulates process and equipment development.”
The Stanford Nanofabrication Facility (SNF) serves academic, industrial and governmental researchers across the USA in areas ranging from optics, MEMS, biology, and chemistry, to traditional electronics device fabrication and process characterization. The SNF is a 10,000 square-foot class 100 cleanroom facility that provides researchers with access to nanofabrication equipment and expertise. The SNF is one of 14 universities that make up the US National Science Foundation’s National Nanotechnology Infrastructure Network (NNIN), which is dedicated to providing nanofabrication resources to researchers across the country in both industry and academia.
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