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23 August 2018

Oxford Instruments supplies China’s first mass-production VCSEL fab

© Semiconductor Today Magazine / Juno PublishiPicture: Disco’s DAL7440 KABRA laser saw.

UK-based plasma etch and deposition processing system maker Oxford Instruments Plasma Technology (OIPT) says that Sino-semic - the first all-Chinese developer and manufacturer of vertical-cavity surface-emitting lasers (VCSELs) for face recognition - has selected its Cobra plasma etch systems for its manufacturing facilities in Taizhou City.

Sino-semic notes that process capability and local support were key factors in its decision to adopt the inductively coupled plasma (ICP) etch Cobra systems. “We chose Oxford Instruments to supply our ICP etch equipment because they offer cutting-edge plasma processing systems and unrivalled process support, which will be invaluable to us during our production scheme,” comments Sino-semic’s vice general manager Li Jun.

Cobra process solutions are designed to support device applications such as lasers, RF, power and advanced LEDs.

“VCSEL-based devices are entering another exciting phase of growth,” says OIPT’s managing director Richard Pollard. “We are thrilled to be providing our VCSEL processing solutions to a pioneering production manufacturer such as Sino-semic.”

Tags: OIPT

Visit: www.oxford-instruments.com/plasma

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