5 April 2017
EVG receives 2017 Austrian Innovation Award
EV Group of St Florian, Austria - a supplier of wafer bonding and lithography equipment for semiconductor, micro-electro-mechanical systems (MEMS) and nanotechnology applications - has received the 2017 Austrian Innovation Award (Staatspreis Innovation 2017) for the development of its SmartNIL nanoimprint lithography technology for micro- and nano-structuring of wafers and other substrates. The award was presented on 28 March by Vice Chancellor & Federal Minister of Science, Research and Economy Dr Reinhold Mitterlehner at a ceremony at the Hall of Sciences in Vienna.
EVG received the award for the project ‘SmartNIL process and HERCULES NIL high-volume production system for nanoimprint lithography’. For electronic, micro-mechanical or optical components and products, existing manufacturing processes are often complex or do not provide the required precision, especially in high-volume production, notes EVG. Nanoimprint lithography can meet these requirements while reducing manufacturing costs by transferring extremely small structures from a stamp to a polymer material. Due to SmartNIL technology, which was specifically developed for this, uniform contact between the substrate and the re-usable imprinting stamp can be achieved even with sub-100nm structures, says EVG. Applications include optical and semiconductor fabrication, medical device manufacturing for DNA and protein analysis, diagnostics and drug discovery, as well as water quality screening.
In total, 485 companies competed for the 37th Austrian Innovation Awards, which were organized by the Austria Wirtschaftsservice GmbH (aws) on behalf of the Ministry of Science, Research and Economy. A jury of experts chose the winner based on its assessment of the nominated companies' products, processes or services, relevant entrepreneurial data as well as the innovation’s impact on the market, environment and society.