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20 May 2014

Shanghai University orders Aixtron BM R&D reactor for graphene and Nanotube research

Deposition equipment maker Aixtron SE of Aachen, Germany has announced that Shanghai University has ordered a BM R&D reactor to be used by its Sino-Sweden Microsystem Integration Technology Center (SMIT).

Prof. Johan Liu, who is leading the graphene/nanotube research at SMIT, said: “We
will be launching extensive new research into the application of nanotubes and graphene
using the BM capabilities in thermal- and plasma-based chemical vapor deposition. We
chose the Aixtron system as we achieved excellent results in our longstanding work with
the BM reactor at Chalmers University in Sweden. The system has been a workhorse for
similar research for the last five years, giving us consistently good results, high uptime, ease
of use and process flexibility.”

Liu will be developing next generation thermal interface/dissipating materials,
heat spreaders, multi-chip interconnects and through silicon vias (TSV) for semiconductor
chip packaging using the BM reactor.

The Sino-Sweden Microsystem Integration Technology Center (SMIT), established in 2003, combines expertise from Shanghai University and Chalmers University of Technology in Gothenburg (Sweden). Founded as a cross-border institution, the center conducts research on microsystem and microelectronics integration by focusing on new technology for future microsystems for industrial applications.

Chalmers University of Technology has extensive experience in the area of graphene
research. The university is leading the EU’s Future Emerging Technology (FET) flagship
project “Graphene”, in which Aixtron plays a key role in the “Graphene Flagship” research
initiative by contributing its sound expertise to enable high quality large-scale graphene
growth through the development of next generation deposition equipment.

Tags: Aixtron Graphene

Visit: www.aixtron.com

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