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4 July 2014

Oxford Instruments' Nanotechnology Seminar at China's Institute of Semiconductors to start with 2D materials sessions

UK-based etch and deposition equipment maker Oxford Instruments’ seminar at the Institute of Semiconductors, Chinese Academy of Sciences (IOS-CAS) in Beijing (24-25 September) will discuss nanotechnology solutions for multiple applications, starting with half-day plenary sessions on 2D materials with guest plenary speaker Dr Aravind Vijayaraghavan from the National Graphene Institute in Manchester, UK, and on Quantum Information Processing with guest plenary speaker professor David Cory from the Institute for Quantum Computing, University of Waterloo, Canada.

Two parallel sessions will focus on thin-film processing and materials characterization, surface science and cryogenic environments, and a wide range of topics will be covered within each technical area. These sessions will include guest international and Chinese speakers from research institutions, speakers from the host institute, and technical experts from Oxford Instruments.

Confirmed speakers include the following (with more to be announced soon):

  • Dr Aravind Vijayaraghavan, National Graphene Institute, Manchester, UK;
  • professor David Cory, Institute for Quantum Computing, University of Waterloo, Canada;
  • professor Guoxing Miao, Institute for Quantum Computing, University of Waterloo, Canada;
  • professor He Ke, Tsinghua University, Institute of Physics, CAS, China;
  • Dr Wang Xiaodong, Institute of Semiconductors, CAS, China;
  • professor Erwin Kessels, Technische Universiteit Eindhoven (TU/e), The Netherlands;
  • professor Zeng Yi, Institute of Semiconductors, CAS, China;
  • professor Robert Klie, University of Illinois Chicago, USA;
  • professor Xinran Wang, Nanjing University, China; and
  • professor Zhihai Cheng, National Centre for Nanoscience and Technology, China.

The thin-film processing sessions will review the latest technical advances in etch and deposition, including: atomic layer deposition (ALD), magnetron sputtering, inductively coupled plasma (ICP) plasma-enhanced chemical vapor deposition (PECVD), nanoscale etch, micro-electro-mechanical system (MEMS), and molecular beam epitaxy (MBE).

Materials Characterization, Surface Science and Cryogenic Environment sessions will cover multiple topics and technologies including: ultra-high-vacuum scanning probe microscopy (SPM), cryo-free low-temperature solutions, x-ray photoelectron spectroscopy (XPS)/electron spectroscopy for chemical analysis (ESCA), an introduction to atomic force microscopy (AFM) and applications such as nanomechanics, in-situ heating and tensile characterization using electron backscatter diffraction (EBSD), measuring layer thicknesses and compositions using energy-dispersive spectroscopy (EDS), nanomanipulation and fabrication within the scanning electron microscope (SEM)/focused ion beam (FIB) system.

“This seminar has been extremely well organised with competent speakers covering a variety of processes and tools for nanofabrication,” comments the host of last year’s Nanotechnology Tools seminar in India, professor Rudra Pratap (chairperson at the Centre for Nano Science and Engineering, Indian Institute of Science, IISC Bangalore). “It is great to have practitioners of the art give talks and provide tips and solutions based on their experience, something that cannot be found in text books,” he adds.

“This workshop is a great opportunity for a wide range of scientists in research and manufacturing to discover practical aspects of many new and established processes, technologies and applications, directly from renowned scientists and a leading manufacturer with over 50 years in the industry,” comments Mark Sefton, sector head of Oxford Instruments NanoSolutions. “Delegates appreciate the informal workshop atmosphere of these events, encouraging delegates to participate through open discussion and sharing their questions and experiences.”
This seminar is free of charge but prior booking is essential.

See related items:

Oxford Instruments completes second series of nanotech seminars in India

Tags:  OIPT Etch

Visit: http://english.semi.cas.cn

Visit: www.oxford-instruments.cn/NanoWorldChina

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