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8 July 2013

Air Products joins SEMATECH’s Front End Processes program to assess materials and technologies for sub-10nm-node III-V devices

Air Products of Lehigh Valley, PA, USA (which provides atmospheric, process and specialty gases, performance materials, equipment and technology) has joined the Front End Processes (FEP) program of SEMATECH (the international research consortium of semiconductor device, equipment, and materials manufacturers). Air Products will work with SEMATECH to assess advanced materials and technologies for the development of sub-10nm-node III-V devices.

Continued scaling will require the use of new materials and chemistries to keep pace with the International Technology Roadmap for Semiconductors (ITRS), says SEMATECH, noting that III-V channels offer significant power and performance benefits (such as higher mobility, enhanced drive current and supply voltage scaling) which enable continued device scaling and performance improvement.

The goal of SEMATECH’s FEP program is to provide novel leading-edge materials, processes, structural modules and electrical and physical characterization methods to support the continued scaling of logic and memory applications.

As a member of the program, located at the College of Nanoscale Science and Engineering (CNSE) of the State University of New York (SUNY) in Albany, NY, Air Products will closely collaborate with SEMATECH’s engineers and leverage SEMATECH’s activities in advanced materials to enable better understanding of the underlying principles responsible for the deposition of III-V structures. The team’s goal will be to help guide the development of new chemical products that address a wide variety of needs for next-generation semiconductor devices.

“Air Products will be cooperating with SEMATECH to accelerate the introduction of innovative products to the marketplace,” says Dr John Langan, the Global Director of Electronics Technology for Air Products. “By leveraging the capabilities of SEMATECH, we are accelerating new product development to fulfill the requests we are receiving for electronics materials from our industry partners,” he adds.

“Air Products’ long-standing and deep expertise in specialty materials will complement our own device and process expertise,” comments Paul Kirsch, director of SEMATECH’s FEP program. “We will work together to develop practical and promising manufacturable solutions to address the emerging needs of the advanced transistor markets.”

Tags: SEMATECH Air Products



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