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Process characterization equipment maker Rudolph Technologies Inc of Flanders, NJ, USA says that seven of its NSX Series inspection tools were recently installed at 6-inch gallium arsenide foundry WIN Semiconductors Corp of Tao Yuan Shien, Taiwan, which specializes in RFICs for cell phones and other communications applications. WIN has also acquired multiple licenses for Rudolph’s Discover defect analysis/yield management software.

As the world’s largest pure-play GaAs foundry, WIN’s purchase was driven by the NSX 105 system’s proven capability to deliver high-volume throughput while maintaining the sensitivity to identify defects as small as 1 micron.

Rudolph recommended a combined defect analysis/wafer-level signature recognition software package for 24/7 process monitoring. This data management system will help WIN to quickly and easily trace patterns back to yield-killing process issues.

“As the leading GaAs manufacturer, they have helped us understand and respond to the specific needs of this rapidly-growing market segment,” says Rudolph’s VP of sales Mayson Brooks. “We look forward to continuing to serve those needs as they execute their plans for further expansion in the coming year.”

“The information provided by the NSX has been critical in our efforts to meet our customers’ requirements for fast delivery and high quality,” comments Chin-chi Chang, WIN’s associate VP, Monolithic Microwaver Integrated Circuit business unit. “At the same time, it helps us meet our own internal needs to quickly achieve profitable process yields. Its unique combination of throughput and sensitivity to small defects has been especially valuable as we strive to keep pace with rapid growth in our segment,” he adds.

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